Advanced Energy Industries announced a comprehensive RF power delivery solution that combines advanced digitally-controlled power supplies with accurate digital impedance matching network. Designed for thin-film industrial applications, the ALTA™ platform ensures versatile, accurate and repeatable control that enhances process stability and provides
Tag: plasma
Advanced Energy strengthens leadership in RF process power solutions by buying TEGAM
Advanced Energy, a specialist in highly engineered precision power conversion measurement and control solutions, has acquired TEGAM, a leading provider of metrology and calibration instrumentation used in semiconductor and advanced industrial markets. Based in Geneva, Ohio, TEGAM strengthens Advanced Energy’s leadership in
Reno Sub-Systems launches integrated RF power systems for semiconductor manufacturing at 7nm or below
Reno Sub-Systems (Reno), a developer of high performance radio frequency (RF) matching networks for leading-edge nanoscale semiconductor manufacturing, introduced its new GenMatch™ Series that integrates the company’s proven solid-state Electronic Variable Capacitor (EVC™) RF match and Precis™ generator technologies into a single