Axcelis Technologies, a specialist supplier of enabling ion implantation solutions for the semiconductor industry, announced multiple shipments of Purion M medium current implanters to mature process technology device makers.
Additionally a new Purion M evaluation tool shipped to a memory device maker. The systems shipped on various dates in the fourth quarter of 2021 and the first quarter of 2022.
Executive Vice President of Product Development, Bill Bintz, commented, “We’re very pleased to announce these new wins for the Purion M platform, supporting a strong start to 2022. They provide additional evidence of continued Purion M strength in the memory and mature process technology markets. Our Purion M ion implanters are designed to address the diverse requirements of our customers offering unparalleled flexibility to meet today’s evolving implant requirements. Strong adoption of the complete Purion platform across these robust market segments continues to be a key driver of our growth.”
