Axcelis Technologies announced the successful closure of a Purion Dragon™ high current evaluation tool at a leading memory manufacturer. The Purion Dragon has a revolutionary high current implanter architecture, featuring innovative orthogonal beam optics, designed for advanced memory and logic applications. With the closure
Tag: implanter
Axcelis announces shipment of Purion high energy system to leading CMOS image sensor manufacturer
Axcelis continues to ship Purion M SiC implanter to European power chip manufacturers
Axcelis Technologies announced multiple follow-on shipments of the company's Purion M™ SiC medium current implanter to several leading power device chip makers located in Europe. The Purion M features Axcelis' innovative solution for high temperature silicon carbide processing. The systems, which shipped
