Atomera, a semiconductor materials and technology licensing company, propels a new approach to GaN-on-Silicon that addresses a key performance barrier limiting its use in mainstream RF applications.

Today, high-performance RF GaN devices are typically built on silicon carbide substrates, which provide excellent performance but remain costly and difficult to scale.

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Silicon offers a lower-cost, more scalable foundation with the potential to support larger wafer sizes and greater compatibility with standard silicon manufacturing; however, GaN-on-Silicon has historically underperformed in RF applications due to parasitic channel losses that reduce efficiency, especially at high frequencies.

Atomera’s MST® technology reduces these losses, helping close the performance gap, and offers exceptional linearity, enabling lower-cost GaN solutions for 5G, future 6G, and other high-frequency RF devices.

“Atomera’s latest GaN-on-Si devices show a substantial reduction in parasitic interface charge, by more than an order of magnitude, and our RF characterization of the first MST-enabled samples confirms a significant reduction in RF losses,” said Mostafa Emam, Founder & CEO at Incize.

“Beyond the small-signal improvements, the large-signal results are particularly compelling. The best-performing MST samples exhibit outstanding linearity and power handling. This linearity benefit extends into the high-power regime, approaching performance levels typically associated with advanced RF SOI technologies. For GaN-on-Si, these results represent a very exciting step forward.”

Atomera’s approach, MST, introduces a thin, oxygen-modified layer near the surface of the silicon wafer, creating a more favorable platform for GaN growth and making silicon a more viable foundation for high-performance RF devices. This controlled layer modifies the silicon lattice structure and helps block the diffusion of electrical dopants, improving crystal quality at the GaN/silicon interface.

“We’re fundamentally changing the economics of GaN. Atomera’s MST is removing barriers to GaN-on-Silicon-based RF systems, unlocking breakthrough RF performance on low-cost silicon substrates,” said Scott Bibaud, president and CEO of Atomera. “Successfully overcoming challenges like the parasitic channel positions Atomera to achieve a competitive advantage in GaN-on-Silicon, which we believe will provide growth opportunities for Atomera in advanced RF and power electronics.” 

In Atomera’s testing, MST enabled more than a 10x reduction in parasitic channel charge, reducing a key mechanism of RF power loss and supporting improved high-frequency GaN device performance. Furthermore, the test data has proven that MST will allow devices to handle significant power while maintaining signal quality, or linearity, under stress.

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“We are delighted by the recent RF test data from Incize,” said Robert Mears, Founder & CTO of Atomera. “Linearity is a top care-about for RF designers, and the new data shows MST GaN-on-Silicon achieving both the ultra-low RF losses and linearity metrics of advanced trap-rich RF SOI. At the benchmark input power of 30mW, the linearity is exceptional, 1000x better than the GaN-on-silicon reference wafer. The MST benefit extends all the way to 10W input power.”

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