Axcelis Technologies, announced shipments of the Company's full family of Purion SiC Power Series™ implanters to several leading power device chipmakers located in Asia and Europe. The shipments include follow on orders for the Purion H200™ Power Series SiC high current implanter
Tag: power device
Axcelis continues to ship Purion M SiC implanter to European power chip manufacturers
Axcelis Technologies announced multiple follow-on shipments of the company's Purion M™ SiC medium current implanter to several leading power device chip makers located in Europe. The Purion M features Axcelis' innovative solution for high temperature silicon carbide processing. The systems, which shipped