반도체 제조용 열 관리 솔루션 전문업체인 ERS electronic이 실제 프로빙 영역에서 30mK 미만의 고정밀 자동 측정이 가능한 온도보정 장치를 개발했다. 특허 출원 중인 ProbeSense™는 프로버(prober)의 프로브 카드 위치에 장착된 온도 센서로 구성된다. 이 센서는 프로버의 XYZ 축 모션 기능을 활용해 웨이퍼 프로빙 시와
Author: Hordon Kim
Hordon Kim is an international editor at Power Electronics Magazine. He covers global news and events in English and runs a consulting agency in Korea.
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